Nikon E200D Semiconductor Inspection Microscope with 8x8" Stage
Both Episcopic and Diascopic Illumination -- A built-in
12V/100W halogen lamp light source, aperture diaphragm and LWD condenser give
you the option of doing diascopic (transmitted light) observation as well as
episcopic (reflected light) observation.
CFI60 LU/L Infinity Optical System -- The L200 series of microscopes incorporate
CFI60 LU/L Infinity Optics providing images with excellent clarity, high
contrast, and a minimum of flare - High numerical apertures and longer working
distances.
Rigid, Stable Design -- Using CAE (Computer Aided Engineering), Nikon has
dramatically increased the rigidity of the L200 series making them extremely
stable and resistant to vibration.
ESD Design -- The bodies of these microscopes are finished with an ESD
(electrostatic discharge) coating to prevent particles from adhering. The
built-in motorized nosepiece uses a shielded center-motor that traps foreign
particles inside, preventing them from falling onto the sample.
Ergonomic Design -- Controls and knobs are positioned low and close to the
operator and the eye point is set at the ideal height for comfortable operation.
Tilting Trinocular Eyepiece Tube -- The Tilting Trinocular Eyepiece Tube allows
continuous adjustment of the tilt angle from 0-30 degrees.
Improved Illumination System -- A new illumination system improves
signal/background ratio and the sensitivity of these microscopes under darkfield
observations to detect minute scratches and surface irregularities within the
sample.
Focus Target -- The addition of a focus target that easily moves in and out of
the optical path allows for easier focusing on bright samples such as bare
wafers.
Wafer Loader Compatibility -- The L200D has been designed to work with the
NWL860 series wafer loaders.
Micron Optics, 240 Cedar Knolls Road , Cedar Knolls, NJ 07927
973-267-5799 phone
973-267-6598 fax
*GIF animation at top is a conoscopic image of quartz captured through an E600pol microscope using the Nikon DXM-1200 digital camera. Courtesy of Daniel Sparling, former employee and now clergyman in training